Electronics-Grade Ultrapure Water (UPW) Equipment for manufacturing semiconductors, microchips, and flat-panel displays.

Detailed Specifications for Electronics-Grade Ultrapure Water (UPW) Equipment

Electronics-grade Ultrapure Water (UPW) equipment is designed to produce water of the highest purity, critical for manufacturing semiconductors, microchips, and flat-panel displays. The system must reliably achieve a resistivity of 18.2 MΩ·cm at 25°C and have extremely low levels of ions, particles, bacteria, and Total Organic Carbon (TOC).

1. Capacity (Flow Rate)

The flow rate of a UPW system is highly customizable based on the fab’s requirements. Systems are typically sized by their hourly or daily production capacity.

• Standard Range:

  • Recirculation Flow: 50 m³/h – 200 m³/h (220 – 880 GPM)

  • Make-up Flow: 10 m³/h – 100 m³/h (44 – 440 GPM)

2. Key Specifications

3. Materials of Construction

The choice of materials is critical to prevent the system itself from becoming a source of contamination.

• Piping & Fittings: PVDF (Polyvinylidene Fluoride) is the industry standard for the high-purity loop. 316L Stainless Steel (Electropolished, Low Carbon) is used for tanks and some pretreatment components.

• Valves: PVDF Diaphragm Valves or PP (Polypropylene) Valves are standard to minimize dead legs and contamination.

• Pumps: Stainless Steel (316L) with high-quality seals.

• Instrumentation: All wetted parts must be compatible (e.g., PVDF, PFA, 316L SS) to avoid leaching.

4. Power Consumption

The power requirement is significant and varies greatly with the system’s capacity. Major power consumers are high-pressure RO pumps and UV lamps.

• Typical Range: 50 kW – 500 kW

  • A small system (10 m³/h) may require ~50-100 kW.

  • A large system (100 m³/h) can require 300-500 kW or more.

Summary:

An 18.2 MΩ·cm Ultrapure Water System is a complex, multi-stage purification train. Its specifications—from the high flow rates and extreme water quality parameters to the inert PVDF materials and substantial power needs—are all engineered to meet the uncompromising purity demands of the electronics industry, ensuring high manufacturing yields and product performance.

SHANGHAI CHONGYANG WATER TREATMENT CO.,LTD is located at Shanghai in China,was founded at 2007,Our company have fixed assets over RMB 0.5million and covers an area of 2000m2,We are a leading enterprise in research and production of Purified Water Equipment, Water For Injection,Pure Steam Generator etc for pharmaceutical company, biotechnology, health care products,cosmetic,hospital etc various industry. Our main products include: Reverse Osmosis System, RO Water System,RO +EDI Water System Electro-deionization System ,Nanofiltration Device,Ultrafiltration System, Deionized Water Equipment,Desalination,RO+Mixed Bed Resin,Water For Injection , Distiller,Pure Steam Generator etc . All the products are sold well in every province and city of the whole country and also exported to about thirty countries and areas with strong technical force, advanced equipment, scientific management system and perfect after-sales service.