| KGA-M7101-01X HOUSING, HEAD 1 |
| 2 KV7-M7102-00X PLATE 1, BRG. 4 |
| 3 KV7-M7103-00X PLATE 2, BRG. 4 |
| 4 KGA-M7105-00X HOLDER, MOTOR Z 2 |
| 5 KGA-M7110-00X L VALVE ASSY. 1 ASSY. |
| 6 KGA-M7110-10X R VALVE ASSY. 1 ASSY. |
| 7 KV7-M7112-01X BRACKET, SENSOR 2 |
| 8 KV7-M7113-01X BRACKET, SENSOR 2 |
| 9 KV7-M7114-00X BRACKET, TENSION 2 |
| 10 KV7-M7122-01X GEAR, MOTOR R 2 Set w / KV7-M7121-01X |
| 2003.02 M320004 |
| 11 KV7-M7123-00X HOLDER, MOTOR R 2 |
| 12 KV7-M7125-00X STAY, SENSOR Z 2 |
| 13 KGA-M7129-00X STOPPER, GUIDE 1 |
| 14 KGA-M7176-00X BELT, N AXIS 2 |
| 15 KGA-M7179-A0X PULLEY N ASSY. 2 |
| 16 KV7-M4592-01X PRESSURE SENSOR ASSY. 4 |
| 17 KV7-M653F-20X SENSOR. 3 ASSY. 1 L=450 (N1 ORG) |
| 18 KV7-M653F-30X SENSOR. 3 ASSY. 1 L=500 (R2 ORG) |
| 19 KV7-M653G-10X SENSOR. 4 ASSY. 1 L=450 (N2 ORG) |
| 20 KV7-M653G-20X SENSOR. 4 ASSY. 1 L=500 (R1 ORG) |
| 21 KV7-M653A-50X SENSOR. 1 ASSY. 2 L=400(Z1,Z2 DOWN) |
| 22 KGA-M7193-01X PINION, Z AXIS 2 |
| 23 KH5-M7111-00X BRACKET, MOTOR R2 2 |
| 24 KH5-M7118-00X PIN 2, TENSION 2 |
| 25 99480-04010 PIN PARALLEL 10 4X10 |
| 26 90K55-4W07GA AC SERVO MOTOR 1 for Z1-axis |
| 27 90K55-4W07GB AC SERVO MOTOR 1 for Z2-axis |
| 28 90K55-4W07HN AC SERVO MOTOR 1 for N1-axis |
| 29 90K55-4W07HV AC SERVO MOTOR 1 for N2-axis |
| 30 90K57-4W07HC AC SERVO MOTOR 1 for R1-axis |
| 31 90K57-4W07HD AC SERVO MOTOR 1 for R2-axis |
| 32 KGA-M7210-01X CCD CAMERA 1 |
| 33 KV7-M7211-00X LENS 095 1 |
| 34 KV7-M7162-01X HOLDER, CAMERA 1 |
| 35 KM7-M7172-00X STAY, FID. LIGHT 1 |
| 36 KV7-M7600-00X FIDUCIAL LIGHT ASSY. 1 |
| 37 KGA-M66F4-00X C.CABLE ASSY. 1 1.7M |
| 38 KV7-M71C1-00X COVER, CAMERA 1 |
| 39 KV7-M71C2-00X STAY, LEFT 1 |
| 40 KV7-M71C3-00X STAY, RIGHT 1 |
| 41 KV7-M71C4-00X COVER, VALVE 2 |
| 42 90563-03J180 SPACER 8 L=18 |
| 43 90563-24J170 SPACER 1 L=17 |
| 44 90563-24J500 SPACER 2 L=50 |
| 45 90563-24J800 SPACER 2 L=80 |
| 46 KV7-M8159-00X SHAFT, HANDLE 1 |
| 47 KV7-M2256-00X GRIP 1 |
| 48 KGA-M71C1-00X COVER, MULTI MACS 1 |
| 49 NK-4N NYLON CLIP 11 |
| 50 97604-04308 SCREW, PAN HEAD W/W 3 |
| 51 95304-03700 NUT HEXAGON 2 |
| 52 92907-03200 WASHER, PLAIN 4 |
| 53 92907-04200 WASHER, PLAIN 4 |
| 54 98507-03008 SCREW, PAN HEAD 6 |
| 55 92A08-03303 SCREW, SET 8 |
| 56 92A08-04305 SCREW, SET 4 |
| 57 91317-03006 BOLT HEX. SOCKET HEAD 2 |
| 58 91317-03008 BOLT HEX. SOCKET HEAD 4 |
| 59 91317-03010 BOLT HEX. SOCKET HEAD 20 |
| 60 91317-03022 BOLT HEX. SOCKET HEAD 8 |
| 61 91317-04014 BOLT HEX. SOCKET HEAD 4 |
| 62 91317-05020 BOLT HEX. SOCKET HEAD 4 |
| 63 KM1-M4592-12X VAC SENSOR BOARD ASSY. 2 |
| 64 KGA-M7111-A0X EJECTER 2 Individual spare parts |
| 65 KV7-M7111-B0X VALVE 4 Individual spare parts |
| 66 91317-03025 BOLT HEX. SOCKET HEAD 2 |
| 67 91317-04025 BOLT HEX. SOCKET HEAD 2 |
| 68 91317-03035 BOLT HEX. SOCKET HEAD |
| KV7-M8101-00X BLOCK, HEAD 1 |
| 2 KGA-M8102-01X PLATE, HEAD 1 |
| 3 KV7-M8103-00X Z AXIS ASSY. 2 NSK |
| 4 KV7-M8113-00X COUPLING SHAFT 2 |
| 5 KV7-M8114-00X SHAFT, R AXIS 2 |
| 6 KV7-M8115-00X DOG, R AXIS 2 |
| 7 KV7-M8116-00X SHAFT, ENCODER 2 |
| 8 KV7-M8117-00X PULLEY, SHAFT HEAD 2 |
| 9 KV7-M8121-00X PLATE L.HEAD FIX 1 |
| 10 KV7-M8122-00X PLATE R, HEAD FIX 1 |
| 11 KV7-M8123-00X COUPLING MOTOR 2 |
| 12 KV7-M8124-00X NUT. PLUG 2 |
| 13 KV7-M8127-00X STAY, STOPPER 1 |
| 14 KV7-M8128-00X STOPPER Z 1 |
| 15 KV7-M8129-00X COLLAR, STOPPER 2 |
| 16 KGA-M8131-00X STAY, EJECTOR 1 |
| 17 KV7-M8132-00X PULLEY, MOTOR R 2 |
| 18 KV7-M8133-00X PLATE, STOPPER 1 |
| 19 KV7-M8134-00X POST 2, SPG Z 2 |
| 20 KV7-M8135-00X POST 1, SPG Z 2 |
| 21 KV7-M8136-00X PLATE1, SENSOR Z 1 |
| 22 KV7-M8137-00X PLATE2, SENSOR Z 1 |
| 23 KV7-M8138-00X PLATE 1, R SENSOR 1 |
| 24 KV7-M8139-00X PLATE 2, R SENSOR 1 |
| 25 KV7-M8142-00X SPRING, RETURN 2 |
| 26 KV7-M8143-00X SPACER, ENCORDER 4 |
| 27 KV7-M8144-00X PLATE. ENCODER 2 |
| 28 KV7-M8145-00X BELT, R MOTOR 2 |
| 29 KV7-M8146-00X PLATE, BRG FIX 2 |
| 30 KV7-M8148-00X O-RING S9 2 |
| 30-1 90200-01J090 O-RING S9 2 |
| 2001.11 M1X0094 |
| 31 KV7-M8155-00X BLOCK, SENSOR Z 2 |
| 32 KV7-M8156-00X STAY, SPG POST 2 |
| 33 KV7-M8158-00X STAY, HANDLE 1 |
| 34 KV7-M8159-00X SHAFT, HANDLE 1 |
| 35 KGA-M8166-00X STAY, VACUUM SENSOR 1 |
| 36 KV7-M8167-00X JOINT, VACUUM SENSOR 2 |
| 37 KV7-M653A-30X SENSOR. 1 ASSY. 2 L=450 |
| 38 KV7-M653A-40X SENSOR. 1 ASSY. 2 L=350 |
| 39 KV7-M2256-00X GRIP 1 |
| 40 KG2-M7181-00X PACKIN MYA 4 2 |
| 40-1 90990-22J001 PACKING 2 2001.11 |
| M1X0094 |
| 41 KGA-M8182-00X EJECTOR 1 ME07M2A-030W |
| 42 KG2-M7198-01X O-RING 1-B 2 P3 |
| 42-1 90200-10J030 O-RING 2 |
| 2001.11 M1X0094 |
| 43 K67-M256J-00X BEARING 5 2 6904ZZ |
| 43-1 90933-01J904 BEARING 5 2 2001.11 M1X0094 |
| 44 KM0-M9194-00X BEARING 2 6902ZZ |
| 44-1 90933-01J902 BEARING 2 |
| 2001.11 M1X0094 |
| 45 90K55-4107GA AC SERVO MOTOR 1 Z1 |
| M960053 |
| 46 90K55-4107GB AC SERVO MOTOR 1 Z2 |
| M960053 |
| 47 90K55-4W073C AC SERVO MOTOR 1 R1 |
| M960053 |
| 48 90K55-4W073D AC SERVO MOTOR 1 R2 |
| M960053 |
| 49 91C00-03210 SPACER 2 M3X10L |
| 50 90185-00J00 NUT U 2 FU00SS(M10) |
| 51 $TSR4-M5 JOINT 2 |
| 52 $TB4-M5 JOINT 2 |
| 53 $SL8-01 JOINT 1 |
| 54 99080-05600 CIRCLIP 2 |
| 55 99009-20800 CIRCLIP 2 |
| 56 KV7-M81C0-00X ENCODER ASSY. 2 |
| 57 KV8-M7125-00X FLANGE.MOTOR 2 |
| 58 KV7-M8169-00X SP_CER COLLAR 2 |
| 59 KV7-M8104-00X HOUSING, SHAFT 2 |
| 60 KV7-M8105-00X SHAFT, MAIN 2 |
| 61 KV7-M8107-00X PLATE, BRG. 2 |
| 62 KV7-M8111-00X SPRING, SHAFT 2 |
| 63 KG9-M7143-00X BEARING 2 7904A5DB |
| 64 KV7-M8125-00X SPACER, BRG OUTER 2 |
| 65 KV7-M8126-00X SPACER, BRG INNNER 2 |
| 66 KG2-M7198-01X O-RING 1-B 2 P3 |
| 66-1 90200-10J030 O-RING 2 |
| 2001.11 M1X0094 |
| 67 90185-04J02 NUT U 2 |
| 68 KV7-M8106-00X SHAFT 1, SPLINE 2 |
| 69 KV7-M8108-00X GUIDE, SPRING 2 |
| 70 KV7-M8109-01X STOPPER, SHAFT 1 2 |
| 71 KV7-M8110-00X STOPPER, SHAFT 2 2 |
| 72 KV7-M8149-00X PLATE, WASHER 2 |
| 73 KV7-M8157-01X COLLAR, NOZZLE 2 |
| 74 KG5-M7166-00X PACKING 2 MYA-3 |
| 75 KV7-M8171-00X PLATE, SPRING 8 |
| 76 99080-04600 CIRCLIP 2 |
| 77 KV7-M81D0-00X NOZZLE ARM ASSY. 4 |
| 78 KGA-M8140-00X STAY, FID CAMERA 1 |
| 79 KGA-M8141-01X STAY, FID LIGHT 1 |
| 80 KGA-M7210-00X CCD CAMERA 1 |
| 81 KV7-M7211-00X LENS 095 1 |
| 82 KV7-M7600-00X FIDUCIAL LIGHT ASSY. 1 |
| 83 KGA-M66F2-00X C.CABLE ASSY 1 6m |
| 84 KGA-M66F4-00X C.CABLE ASSY 1 1.7m |
| 85 KV7-M8160-00X STAY3, HEAD COVER 1 |
| 86 KV7-M8161-00X STAY2, HEAD COVER 1 |
| 87 KGA-M8162-00X COVER, HEAD 1 |
| 88 KV7-M8163-01X COVER, FID. CAMERA 1 |
| 89 KV7-M8164-00X STAY1, HEAD COVER 1 |
| 90 KV7-M8165-00X STAY, CABLE 1 |
| 91 91C00-04210 SPACER 2 M4X10L |
| 92 91C00-04215 SPACER 1 M4X15L |
| 93 95306-05600 NUT.HEXAGON 2 |
| 94 92D18-02006 BOLT HEX 2 M2X0.4X6 |
| 95 KG7-M7170-00X WASHER 2 |
| 96 91317-03012 BOLT HEX. SOCKET HEAD 6 |
| 97 91317-03008 BOLT HEX. SOCKET HEAD 12 |
| 98 KM1-M4592-12X VAC SENSOR BOARD ASSY. 2 |
| 2001.9 M190105 |
| 99 K46-M8527-C0X FILTER 2 |
| 100 90990-17J008 O-RING 2 |
| 101 KGA-M81C2-00X SPACER BOLT 2 |
| 102 |
| 91317-03006 BOLT HEX, SOCKET HEAD 20 |
| 103 91317-03010 |
| BOLT HEX, SOCKET HEAD |
| 28 |
| 104 91317-04008 |
| BOLT HEX, SOCKET HEAD |
| 16 |
| 105 91317-04020 |
| BOLT HEX, SOCKET HEAD |
| 4 |
| 106 91317-04030 |
| BOLT HEX, SOCKET HEAD |
| 5 |
| 107 91317-04040 |
| BOLT HEX, SOCKET HEAD |
| 2 |
| 108 91317-05010 |
| BOLT HEX, SOCKET HEAD |
| 4 |
| 109 91317-05016 |
| BOLT HEX, SOCKET HEAD |
| 10 |
| 110 91317-05025 |
| BOLT HEX, SOCKET HEAD |
| 1 |
| 111 91317-05035 |
| BOLT HEX, SOCKET HEAD |
| 1 |
| 112 91317-06020 |
| BOLT HEX, SOCKET HEAD |
| 4 |
| 113 91317-08020 |
| BOLT HEX, SOCKET HEAD |
| 1 |
| 114 98907-03004 SCREW BIDING HEAD 2 |
| 115 98507-03008 SCREW PAN HEAD 2 |
| 116 98507-03010 SCREW PAN HEAD 2 |
| 117 92A08-04004 SET SCREW 10 M4X4 |
| 118 99480-04012 PIN, PARALLEL 14 |
| 119 KV7-M8172-00X SCREW 6 M2.5X4 |
| 120 KV7-M811H-A0X ROLLER LOCK, SPARE 1 |
| 121 KV7-M811S-A0X SPLINE SHAFT 1, SPARE 1 |
| 122 KV7-M813H-A0X HOLDER SHAFT, SPARE |